Samsung, SK, Micron to unify robot charging standard for semiconductor fabs

Samsung Electronics, SK hynix, and Micron Technology of the US have formed a working group with SEMI, the global semiconductor equipment and materials association, to establish a charging standard for autonomous mobile robots (AMRs) in semiconductor fabs. The three memory chipmakers that dominate the global DRAM market are expected to lower robot adoption costs and expand the automation ecosystem by creating a common specification for converting legacy production facilities to unmanned operation.

According to East Asia Brief on Nov. 9, Samsung Electronics, SK hynix, and Micron have begun technical discussions with SEMI to create a unified charging standard for mobile robots in semiconductor cleanrooms. They have started work to unify key hardware and software standards, including robot battery specifications, charging station equipment, docking contacts, and wireless communication protocols.

The standardization discussions are focused on legacy fabs where overhead hoist transport (OHT) systems are difficult to install. New fabs built within the last 10 years mainly use OHT, which carries wafers on ceiling rails, but legacy fabs built for 200mm or early 300mm wafers have low ceilings and narrow aisles, making additional rail installation practically impossible. As a result, chipmakers are deploying autonomous mobile robots, mobile manipulators, and humanoid robots at existing lines in Giheung, Hwaseong, Cheongju, and Icheon to automate logistics and maintenance.

The obstacle is that robot manufacturers each have different battery designs, charging docks, and power supply methods. Cleanrooms, which must strictly control fine dust by operating air filtration systems, are extremely expensive to maintain in terms of space. Installing multiple incompatible charging docks takes up valuable factory floor space and increases operating costs.

If charging docks are standardized, robots from different manufacturers can share the same charging stations. In addition to reducing physical space requirements, factory software can automatically dispatch robots with low batteries to any available charger, preventing production interruptions.

Working-level staff are drafting technical parameters in four key areas: battery cell size, docking electrical contacts, and wireless communication protocols. In particular, mechanical contact methods that do not generate metal dust or chemicals are required to meet the strict contamination control standards of semiconductor cleanrooms. Safety protocols, such as automatic thermal shutdown systems that do not affect production lines, are also being evaluated to prevent fire risks from lithium-ion batteries.

A software interface linking robot charging stations with the factory's central manufacturing execution system (MES) is also being developed. This will prevent robots from running out of power during wafer transport missions and automatically coordinate charging schedules between tasks. Standardization of infrastructure is also being addressed, including communication protocols for elevator calls and automatic door passage, and integration of optical markings for part recognition.

According to the source data, Samsung Electronics accounts for about 41% of global DRAM production, SK hynix 34%, and Micron 23%. By cooperating in the non-competitive area of cleanroom infrastructure, the three market-dominating companies can induce robot manufacturers to mass-produce standard hardware and lower procurement costs. The working group plans to present the interface draft at a SEMI standardization review meeting in the first quarter of next year.

※ This article is an AI translation of the Korean original published by Korea Credit News; it was checked by automated quality guards and published by the English edition desk.